Imaging Ellipsometry allows precise measurement of optical properties and layer thicknesses down to 0.1nm. It combines ellipsometry with microscopy to enable measurements on small structures with a lateral resolution down to 1 µm. All pixels are measured in parallel. Direct ellipsometric contrast images provide a fast detection of defects and contaminations.
Application fields are 2D materials, MEMS, biochips, solar cells, flat panels, Langmuir-Blodgett films, polymers, etc.
Active vibration isolation is the most effective solution to isolate sensitive equipment from disturbing vibrations. Application examples are hardness tester, scanning probe microscopy, scanning electron microscopy, micromanipulation, nanoindentation and profilometer.